|
The
Ultrapure Chemicals
|
Juergen
Braun, Merck
Managing Director, Merck Electronic Chemicals Singapore
|
| |
The
CLEAN and the DIRTY. The meaning of CLEAN will be demonstrated
by means of process chemical requirements in the IC-manufacturing
process. Continuous shrinkage of chip geometries are challenging
chemical and equipment manufacturers to come up with new solutions
to produce, analyse and maintain highest purity levels of
their products from manufacturing, packaging, transportation
and delivery into the Fabs. Similarly all contact materials
of these chemicals like containers, piping, filters etc. must
be inert enough to guarantee no degradation of chemical cleanness.
During the last decades ionic impurity levels of process chemicals
have been lowered from ppm to ppt levels. Likewise particle
sizes were reduced from 5µm to 0,1µm.
|
|
